透射电子显微镜(TEM-EDS)
【概要】不同于扫描电子显微镜，透射电子显微镜（Transmission Electron Microscope， TEM）是利用电子枪发出的高速的、聚集的电子束照射至非常薄的样品，收集透射电子流经电磁透镜多级放大后成像的高分辨率、高放大倍数的电子光学仪器。
应用一：芯片结构解析
如图所示为22nm Fin FET 结构的 TEM 示意图
应用二：元素组成分析
如图所示为利用 TEM-EDS 观察到器件截面多达 11 种的元素 mapping
分析手法
We provide two-dimensional nanoscale electrical properties measurement and imaging. Advanced electrical characterization technology and research into next generation semiconductor production equipment are our focus.
分析案例
Advanced analysis of devices including solar cells, CMOS sensor, logic/power devices and other third generation of semiconductor materials such as GaN & SiC are provided.
技术研发
Experts with decades of industry experience give the partners professional and Personalized solutions
分析手法
分析案例