分析手法
We provide two-dimensional nanoscale electrical properties measurement and imaging. Advanced electrical characterization technology and research into next generation semiconductor production equipment are our focus.
分析案例
Advanced analysis of devices including solar cells, CMOS sensor, logic/power devices and other third generation of semiconductor materials such as GaN & SiC are provided.
技术研发
Experts with decades of industry experience give the partners professional and Personalized solutions
分析手法
分析案例
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【概要】当电子束穿过样本表面时，会产生二次电子、反射电子、特征X射线等信号。扫描电镜（Scanning Electron Microscope, SEM）主要通过收集二次电子来反映样本的表面形貌等信息，搭配能量分散 X 光谱仪(Energy Dispersive Spectrometer， 简称 EDS)后，可进一步对材料成分进行定性与半定量分析。
应用一：芯片表面缺陷与断面结构分析
如图所示为器件断面结构的高倍图
应用二：元素组成分析
如图所示为在3kV下的 SEM 中获得的去层 NAND 器件的表面元素分布
